标准号:GB/T 26068-2018 |
| 中文标准名称:硅片和硅锭载流子复合寿命的测试 非接触微波反射光电导衰减法 | |
| 英文标准名称:Test method for carrier recombination lifetime in silicon wafers and silicon ingots—Non-contact measurement of photoconductivity decay by microwave reflectance method | |
| 标准状态: 现行 | |